Technical Agreement & Configuration

技術協議及配置

一、 設備概述 Product Description

1、 Name： 3D Microscope

名稱： 3D 顯微鏡

2、 Type： Zeta-20A

型號： Zeta-20A

3、 Product Features:

產品特點：

l The Zeta-20A advanced surface measurement system provides 3D imaging and metrology capabilities in a flexible, cost-effective package. Zeta Instruments’ proprietary focus map technology enables rapid, true-color imaging and quantitative analysis of surfaces for off-line product inspection. The Zeta-20A automatically gathers data on step height, feature volume, dimensions and roughness on multiple measurement sites to give you the data you need to monitor and optimize your manufacturing processes.

Zeta-20A是集三維成像和計量功能于一身的先進表面測量系統。它功能配備齊全、使用方便，是三維測量系統中性能價格比的選擇。Zeta-20A能夠自動聚焦采集樣品上的多個點的工藝參數，如臺階高度、體積、尺寸及粗糙度等，為您提供監控及優化生產流程所需的數據。

l Zeta metrology systems have the unique capability to combine multiple measurement functions into a single tool. Our Solar TRIPLE PLAY configuration targets solar cell characterization by providing three key measurements in one high-value tool package.

澤塔測量系統的獨到之處在于它能集多種測量功能于一身。 我們的太陽能三合一應用軟件包以太陽能電池業為服務對象，提供高價值的三項關鍵測量功能。

l Texture Characterization - Our optical profiling capability permits the rapid analysis of textured surfaces. 3D visualization delivers a qualitative view of the surface, while feature size histograms, linear and areal roughness calculations provide quantitative data on base or acid etched surface textures.

絨面分析 - 我們的光學輪廓測量功能可以用來對絨面做快速分析。 三維圖像可以提供絨面的定性資料。 而絨面上的幾何特征（如金字塔等）尺寸的直方圖， 線和面粗糙度的計算值等可用來定量描述由酸或堿腐蝕所產生的絨面特征。

l Finger Contact Profiling - Imaging solar finger metal contacts is difficult because of the vast difference in reflectivity between the AR-coated texture and the metal contact. The textured area can have a reflectivity of 0.5% or less while the metal reflectivity can be over 90%. Zeta solar application software includes anti-halation algorithms that compensate for the huge difference in surface brightness to generate clear 3D images of the contact on the texture while also delivering accurate step height and profile data.

金屬柵線輪廓測量 – 由于金屬柵線上光的反射率與鍍有防反膜的絨面上光的反射率之間存在著巨大的差異，要對絨面上的金屬柵線進行成像比較困難。往往絨面區域的反射率小于0.5％，而金屬區域的反射率可超過90％以上。澤塔太陽能應用軟件運用反光暈算法，彌補了不同區域表面亮度之間的巨大差異，從而可以清晰地對金屬柵線進行三維成像，同時提供準確的臺階高度值和輪廓分布數據。

二、 設備配置 Configuration

三、 技術指標 Acceptance Specifications

l X,Y Resolution

A series or lines 0.5μm wide with 0.5μm pitch will be imaged with the 100X objective.  

XY軸分辨率

用100倍物鏡對0.50微米寬，相間0.50微米的一系列長方形短線進行成像。肉眼應該可分辨每條短線。

l 橫向重復精度<1%

l 橫向準確度< 1%

用50倍物鏡對0. 7微米寬，相間0. 7微米的一系列長方形短線進行成像。肉眼應該可分辨每條短線。

l Z accuracy

(base on a 25μm step height reference that be scanned 10 times)Average of 10 readings to be within ±2.5% of the step height value (the tested wafer from Trina or Zeta)

Z軸精度，對澤塔儀器公司25微米(目標值)臺階標樣重復掃描10次，10次測量平均值應落在臺階標樣高度值的±2.5%以內 

l Z軸測量精度<13nm

l Z repeatability

(base on a 25μm step height reference that be scanned 10 times)The standard deviation of the 10 readings divided by the average value will be less than 1.5% (the tested wafer from Trina or Zeta)

Z軸重復性，對澤塔儀器公司25微米(目標值)臺階標樣重復掃描10次，將10次測量標準偏差值除以10次測量平均值，所得結果應小于1.5%

l objectives lens：5X、50×、100x

物鏡：5倍、50倍、100倍

l 可測最大高度：40mm

l 測試速度：<30s

l Computer : 16GB RAM (minimum), 500GB Hard Drive (minimum), 3D accelerator graphics card, Firewire, USB 2.0 ports，22” LCD monitor

計算機：大于16GB內存，大于500GB硬盤，3D圖像顯示加速卡，Firewire B，USB 2.0接口，24英寸液晶顯示

l 軟件功能：粗糙度、臺階高度 、截面，面積、比表面積、多點測量、網版測試。

l 具有防震效果

測量頭壽命承諾> 50,000 hours